uniformity% max-min)/ (2*average) (max-min)/ (max+min) 17
uniform space 0. X, d \langle X , d \rangle {x } \left\ { x_ {\lambda} \right} x x .
""Uniformity .
reads20% IGV...
63559049? .
187 UNIFORMITY 1. Uniformity IC C.D.
218uniformity term72.572.7SimCLRSoTA uniformity term
(Dry Etch)uniformity 5. (Etch Profile) Etch Profile ().
- @ONE 2. 15000+.
Apodization refers to the uniformity of illumination in the entrance pupil of the system. By default, the pupil is always illuminated uniformly. However, there are times when the pupil should.
